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This standard specifies the application of more general service standards as required within a cluster tool
SEMI M55 — Specification for Polished Monocrystalline Silicon Carbide Wafers
With the standardized measurement method and a guide for standardized reporting of results
SEMI E46-0307 (technical revision)
T01300 - SEMI T13 - Specification for Device Tracking: Concepts, Behavior, and Services Revision:SEMI T13-1104 - Superseded This standard specifies the applicationThis standard was technically approved by the global Traceability Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www. semi. org in June 2010. Originally published June 2004; previously published November 2004. The purpose of this specification is to trace devices for the sake of quality control, warranty, security or any other reasons. This specification makes