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T00700 - SEMI T7 - 二次元マトリクスコードシンボルの両面研磨ウェーハ裏面マーキングの仕様 Revision:SEMI T7-0303 (Reapproved 0709) - Superseded 1 The scope of this

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Description

1  The scope of this Specification and Guide is two Grades and three Tiers of sulfuric acid used in the semiconductor industry

注意: 本文書は,編集上の修正を伴い,再承認された。

This Document covers requirements for two grades of hydrogen used in the semiconductor industry

The guide may also be used for large particles not covered by existing particle-detection metrology

T00700 - SEMI T7 - 二次元マトリクスコードシンボルの両面研磨ウェーハ裏面マーキングの仕様 Revision:SEMI T7-0303 (Reapproved 0709) - Superseded 1 The scope of thisNotice: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Traceability Committee2009513global Audits and Reviews Subcommittee20096www. semi. org199720033 SEMI M1. 15300 mm SOIISO IEC 16022 Referenced SEMI Standards SEMI M1. 15 Standard for 300 mm Polished Monocrystalline Silicon

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