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Once present in clean facilities
and data access
A detailed list of the fundamental GEM requirements and additional GEM capabilities can be found in § 11
SEMI E92 — Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (BOLTS/Light)
C03900 - SEMI C39 - Specification for Potassium Hydroxide Pellets Revision:SEMI C39-0699 - Superseded Once present in clean facilitiesNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for potassium hydroxide pellets used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown
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