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This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment
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and exposure
This edition was approved for publication by the global Audits and Reviews Subcommittee on March 16
E18200 - SEMI E182 - Specification for Panel FOUP Load Port for Panel Level Packaging StdPbc-0724 This Specification defines the dimensions* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
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