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SEMI C28-0618 (technical revision)
SEMI E30-0307 (technical revision)
SEMI E35-0299 (technical revision)
SEMI 3D2-0216 (technical revision)
F10500 - SEMI F105 - Guide for Metallic Material Compatibility in Gas Distribution Systems StdPbc-1011 SEMI C28-0618 (technical revision)The purpose of this Guide is to document the industry acceptable compatibility of metallic materials with semiconductor process gases. This Guide is applicable to metallic materials that are exposed to process gases within the gas distribution systems of semiconductor manufacturing equipment. It is not applicable to high pressure, bulk delivery systems. This Guide is specific to High Purity and Ultra High Purity chemical delivery systems. Referenced
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