HB00300 - SEMI HB3 - Specification for the Mechanical Interface for 150 mm HB-LED Load Port StdPbc-0214 This Guide incorporates the following

This Guide incorporates the following methodologies:

本仕様では，SEMI F20に従いステンレス鋼で製作された配管や部品の接ガス・接液面の特性評価に関する要求条件および仕上げの合格判定基準について定義し，また半導体製造で使用される気体と液体の管理や収納を目的としている。

2 This Document requires that the GEM fundamental requirements and applicable additional capabilities have been implemented on the prober equipment

1 — Specification for SOAP Implementation of Equipment Client Authentication and Authorization

HB00300 - SEMI HB3 - Specification for the Mechanical Interface for 150 mm HB-LED Load Port StdPbc-0214 This Guide incorporates the followingThis Standard was technically approved by the HB LED Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www. semiviews. org and www. semi. org in October 2016; originally published November 2013. The purpose of this Document is to define the basic interface dimensions of a load port and their arrangements on HB LED manufacturing equipment, where HB LED